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ULVAC,Inc. is a research and development-oriented integrated enterprise that, based on its widely applied vacuum technology across various fields, is dedicated to pioneering sophisticated processing techniques. In 2000, the company invested in the establishment of Aifa Ke Vacuum Technology (Shanghai) Co., Ltd., which provides after-sales services in China for the installation, debugging, maintenance, and parts sales of ULVAC Group equipment. In 2006, building on this foundation, ULVAC Group consolidated its sales network in China to form Aifa Ke Trading (Shanghai) Co., Ltd. In 2014, with the establishment of the Shanghai Free Trade Zone, to meet the demand of numerous clients for tax-free foreign currency transactions, Aifa Ke Vacuum Equipment (Shanghai) Co., Ltd. was established, fully funded by Aifa Ke Trading (Shanghai) Co., Ltd. The business scope of Aifa Ke Trading (Shanghai) Co., Ltd. includes:
- Equipment Sales: Equipment for areas such as flat-panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touchscreens, vacuum metallurgy, vacuum packaging, and research and development.
- After-Sales Services: Equipment installation and debugging, regular maintenance, repairs, parts sales, equipment modification, and parts cleaning.
- Other Services: Sales and after-sales services for products of domestic and international group companies, and sales of various types of targets.
KLA-TENCOR SEMICONDUCTOR Technology (SHANGHAI) Co., Ltd. was established on June 2, 2004. It is a wholly foreign-owned R&D center set up by KLA Corporation (formerly KLA-Tencor), the leading global company in semiconductor inspection and metrology equipment, in the Zhangjiang High-Tech Park in Shanghai, China. The company is not an independent manufacturing enterprise; its core role is to serve as a crucial link within KLA's global R&D system. It focuses on providing engineering process control, production management solutions, and localized technical support for new products related to the group's semiconductor and microelectronic product manufacturing equipment. Its R&D activities comprehensively cover software design, hardware development, and application engineering. Benefiting from KLA's dominant market position—holding over 70% market share in the semiconductor inspection field and serving top global chip manufacturers such as Intel, TSMC, and SMIC—this Shanghai R&D center also extensively provides technical support for cutting-edge manufacturing areas, including advanced packaging, compound semiconductors, and MEMS (Micro-Electro-Mechanical Systems).
Yanqi Lake Basic Manufacturing Technology Research Institute (Beijing) Co., Ltd. is a wholly-owned subsidiary of China Academy of Machinery Science & Technology Group Co., Ltd., located in Huairou District, Beijing. As a state-owned enterprise dedicated to fundamental and common technology research in the equipment manufacturing industry, it aims to implement the national strategic requirements for advancing industrial foundations and modernizing industrial chains, and has been selected as a "Sci-Tech Reform Demonstration Enterprise" by the State-owned Assets Supervision and Administration Commission (SASAC). The company primarily integrates resources from the former China Machinery Productivity Promotion Center and, based on this, has established a comprehensive technical service system covering areas such as standard services, testing technologies and equipment, reliability research, inspection services, nuclear power technical services, and consulting services. The company places a high priority on research and development, with over 90% of its employees holding bachelor's degrees or higher, a significant proportion of whom are doctors and masters, and it employs many senior engineers and master’s/doctoral supervisors. Additionally, the institute has established several important scientific research platforms, such as the National Industrial Machine Tool Innovation Research Institute.
iSABers Group Co., Ltd. is a national high-tech enterprise at the forefront of semiconductor bonding and integration technologies in China. The company's core competencies lie in R&D and manufacturing of advanced bonding equipment and high precision bonding process solutions, with applications spanning cutting-edge domains including advanced packaging, semiconductor device fabrication, wafer-level heterogeneous integration, and MEMS sensor production. Through its dual-drive strategy of "Equipment Manufacturing + Process Services", the company delivers end-to-end semiconductor bonding solutions. Its proprietary technology portfolio comprises four self-developed product lines with independent IP rights: Ultra-High Vacuum Room-Temperature Bonding Systems, Hybrid Bonding Equipment, Thermocompression Bonding Systems, and Customized Process Service Packages. Driven by continuous innovation, iSABers is committed to providing high-precision, process-stable, and cost-competitive bonding technologies to the global semiconductor ecosystem, empowering strategic emerging industries such as 5G communications, AI, and new energy vehicles.
Wellrun Microelectronics possesses core electron optics technology and provides high-resolution, high-efficiency electron beam metrology and defect inspection instruments for the semiconductor industry, as well as scientific instruments for research purposes. We offer comprehensive solutions for wafer yield improvement, including both hardware and software. The Critical Dimension Scanning Electron Microscope (CD-SEM) and Electron-Beam Inspection (EBI) instruments developed and manufactured by us are key tools for wafer production quality control and yield assurance, providing essential microdata for multilayer and complex integrated circuits. Additionally, the Schottky field emission scanning electron microscope (SEM) launched by our company plays an important role in the semiconductor field,encompassing raw materials, equipment, chip design, wafer manufacturing, packaging and testing, discrete devices, and end product production and R&D processes. Wellrun Microelectronics brings together experts and senior engineers from home and abroad, with rich engineering and productization experience in the semiconductor field, and is committed to becoming a leading company in the semiconductor industry with metrology and inspection instrument solutions.
The company is a high-tech enterprise specializing in the research and development of MEMS software and the design and manufacturing of MEMS hardware, possessing internationally advanced MEMS and micro-nano design technologies.
Main Business:
- World-Class MEMS Design Software: Capable of 3D modeling, layout design, process simulation (including dry/wet etching and atomic-level corrosion simulation), multi-physics coupling analysis (via finite element/boundary element methods), and system-level MEMS-IC co-simulation for MEMS devices, providing comprehensive design solutions.
- 3D Packaging Design Platform: Supports a wide range of materials with customizable properties (e.g., resistivity, thermal conductivity) for linear/non-linear calculations. It enables the design of complex 3D structures with full-process physical simulation, analyzing thermal, thermomechanical, and stress effects, as well as frequency drift, to assist with thermal management. The platform offers open customization services, including PDK (Package Design Kit) development.
- MEMS Design and Fabrication Platform: Design, production, packaging, testing, and consulting for various MEMS sensors, including piezoelectric, pressure, temperature/humidity, gyroscopes, accelerometers, microfluidic sensors, RF switches, and more.
- MEMS fabrication services covering key processes such as bonding, lithography, and etching.
- MEMS/CMOS design, low-power CMOS circuit design, and low-power sensor interface circuit design.
